Fraunhofer IZM > R&D Activities > Wafer Level Integration

R&D-Highlights




Wafer Processing

Integration at wafer level
The highest integration densities possible in heterogeneous assemblies are achieved using wafer-level integration. All
processing steps are carried out at wafer level after the actual front-end processes have been completed. The packages we develop have lateral widths almost identical to the chip dimensions. We also include active and passive components on the wafer in interlayers and even higher integration densities are achieved with 3D integration using through-silicon vias (TSV).


Wafer Level Integration Technologies 2008

 
Ultrafine pitch bumping for X-ray detectors
Department High Density Interconnect & Wafer Level Packaging
Bump on flexible lead
Department High Density Interconnect & Wafer Level Packaging
3D Integration of heterogeneous systems (3D-IC/MEMS stacks) based on post BeoL TSV technologies
Department Si Technology and Vertical System Integration

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